CMOS-compatible field effect nanoscale gas-sensor: Operation and annealing models

6533b821fe1ef96bd127c129

RESEARCH PRODUCT

CMOS-compatible field effect nanoscale gas-sensor: Operation and annealing models

J. Woellenstein A. Chaiyboun M. Bauersfeld Juan-jesús Velasco-vélez Theodor Doll C. Wilbertz

subject

Materials science CMOS business.industry Annealing (metallurgy)Logic gate Electronic engineering Field effect Optoelectronics Fokker–Planck equation Conductivity business Nanoscopic scale Cmos compatible

description

Complete modelling of electrically controlled nanoscale gas sensors with Poisson, Wolkenstein, Fokker-Planck and continuity is presented. Based on a plausible Drift explanation we developed suitable models for sensitivity control and operational modes. An onset for CMOS-complying annealing procedures is given.

year	journal	country	edition	language
2008-10-01	2008 IEEE Sensors

https://doi.org/10.1109/icsens.2008.4716394

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