6533b821fe1ef96bd127c2df

RESEARCH PRODUCT

Precise structural investigation of symmetric diblock copolymer thin films with resonant soft X-ray reflectivity

Patrick TheatoPatrick TheatoPatrick TheatoJan LüningYa LiuKatja NillesWei MaBoris Vodungbo

subject

chemistry.chemical_classification[PHYS.PHYS.PHYS-OPTICS]Physics [physics]/Physics [physics]/Optics [physics.optics]Materials sciencechemistry.chemical_elementGeneral ChemistrySubstrate (electronics)PolymerCondensed Matter PhysicsMolecular physicsXANESCrystallographychemistryCopolymerLamellar structure[PHYS.PHYS.PHYS-CHEM-PH]Physics [physics]/Physics [physics]/Chemical Physics [physics.chem-ph]Thin filmRefractive indexCarbon[PHYS.COND.CM-SCM]Physics [physics]/Condensed Matter [cond-mat]/Soft Condensed Matter [cond-mat.soft]

description

Symmetric diblock copolymers are known to form lamellar structures in the bulk of an organic thin film. Polymer/polymer and polymer/substrate interfaces play a critical role in this application. Here, we report the investigation of multiple buried interfaces by using a novel technique resonant soft X-ray reflectivity which benefits from enhanced contrast between different polymers near the carbon K-edge. This allows us to obtain a precise interface structure. We also present an alternative method to determine optical constants of polymers by fitting X-ray reflectivity of polymers with known structural parameters at specific soft X-ray energies. This approach is compared with the way of obtaining β by NEXAFS and calculating δ via the Kramers–Kronig relationship. Finally, by using the determined index of refraction, the precise structure of a multilayer formed by a diblock copolymer is obtained by successfully fitting the resonant soft X-ray reflectivity profile.

10.1039/c3sm50976ahttps://hal.science/hal-04055612