The influence of composition on the solid state properties of anodic films on Al-Ta alloys

6533b82afe1ef96bd128c70a

RESEARCH PRODUCT

The influence of composition on the solid state properties of anodic films on Al-Ta alloys

Francesco Di Franco Andrea Zaffora Monica Santamaria Francesco Di Quarto E. Tsuji H. Habazaki

subject

Settore ING-IND/23 - Chimica Fisica Applicata solid state properties anodic films Al-Ta alloys

description

Microelectronics is very important for almost all kinds of technology evolutions in the past four decades. In this area, the dielectrics science occupies a prominent place in providing the dominant technology in integrated capacitors or gate insulators.

year	journal	country	edition	language
2015-01-01

http://hdl.handle.net/10447/189667

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