6533b82bfe1ef96bd128e00f
RESEARCH PRODUCT
Ultrathin metal oxidation for vacuum monitoring device applications
Theodor DollUlrich KunzeThomas HaasSebastian Mädersubject
Materials scienceKineticsAnalytical chemistryOxidechemistry.chemical_elementSurfaces and InterfacesCondensed Matter PhysicsCopperSurfaces Coatings and FilmsElectronic Optical and Magnetic MaterialsMetalchemistry.chemical_compoundchemistryAluminiumvisual_artMaterials Chemistryvisual_art.visual_art_mediumThin metalElectrical and Electronic EngineeringComposite materialdescription
The oxide growth on thin metal films at room temperature has been investigated in terms of resistance change during oxidation. These data have been interpreted using the extended Cabrera–Mott theory of oxidation by Boggio. The resulting oxide thickness as well as the oxidation kinetics was found to depend on pressure. According to this dependence, oxidation of ultrathin metal films can be applied for monitoring the vacuum quality inside an evacuated environment. The performance of aluminum and copper sensing layers are compared with respect to sensor lifetime and response. Furthermore, the theoretically evaluated and resistively measured oxide thicknesses are verified by TEM studies.
| year | journal | country | edition | language |
|---|---|---|---|---|
| 2011-05-04 | physica status solidi (a) |