6533b82efe1ef96bd1293b08

RESEARCH PRODUCT

Nanomanufacturing/Nanotechnology

subject

description

This chapter provides comprehensive knowledge regarding the fabrication of nanoproducts and element of micro-electromechanical systems using various techniques and processes. Both well-established techniques, such as nanomachining (ultra-precision) and new trends in improving nanoprocesses taking into account AFM, laser beam machining, electron beam machining processes are overviewed. The background of nanomachining processes, including typical machining operations such as turning, milling and grinding and different construction materials (metallic and nonmetallic), is outlined. The physical mechanisms responsible for the transition from brittle to ductile regime machining are explained. Moreover, a special focus is given on new constructions, control systems and effective applications of nanomachining techniques. In addition, the focus was directed towards the nanotools applied, special tooling systems, fixturing systems and selection of machining conditions. All nanomachining techniques discussed are supported by new research works, original investigations and practical examples. In addition, measurement scaling to nanolevels is highlighted and a number of appropriate measuring devices and measurement systems are presented. Some developing trends in nanomanufacturing termed tip-based nanomanufacturing are discussed.