6533b831fe1ef96bd1298452
RESEARCH PRODUCT
Effects of the process conditions on the plume of a laser-irradiated indium–tin-oxide target
Claudio CaliRoberto MacalusoMauro Moscasubject
Materials sciencebusiness.industryOxideOptical emission spectroscopy Indium–tin-oxide Pulsed laser ablation Plasma diagnostics Time of flightchemistry.chemical_elementLaserSettore ING-INF/01 - ElettronicaFluencehumanitiesAtomic and Molecular Physics and OpticsElectronic Optical and Magnetic Materialslaw.inventionPlumeIndium tin oxidechemistry.chemical_compoundOpticschemistrylawEmission spectrumElectrical and Electronic EngineeringPhysical and Theoretical ChemistryTinbusinessIndiumdescription
Abstract The plume of a laser-ablated indium–tin-oxide target was investigated by optical emission spectroscopy. Atomic and ionic species of indium, tin and oxygen were observed; moreover, molecular bands of indium oxide were identified in the fluorescent spectra. The effects of the oxygen as a background gas and of the laser fluence on the behaviour of the ejected particles were studied with respect to the intensity of the emission and the delay time as a function of the observation distance from the target surface. The non-linear behaviour of the fluorescent species with the process conditions could infer spatial variations of the plume composition. The analysis demonstrates a plume expansion process where the ejected species interact with the molecules of the background gas by reactive collisions.
| year | journal | country | edition | language |
|---|---|---|---|---|
| 2001-10-01 | Optics Communications |