6533b833fe1ef96bd129bfd2

RESEARCH PRODUCT

Shaded-mask filtering: novel strategy for improvement of resolution in radial-polarization scanning microscopy

C. Ibáñez-lópezManuel Martínez-corralMaría Teresa Caballero Caballero

subject

MicroscopeMaterials sciencebusiness.industryGeneral EngineeringScanning confocal electron microscopyFilter (signal processing)Atomic and Molecular Physics and Opticslaw.inventionOpticsApodizationlawRadial polarizationNear-field scanning optical microscopeOptical filterbusinessImage resolution

description

Radially polarized illumination produces, in combination with annular pupil filtering, the sharpest focal spot. However, the enhanced sidelobes produce an effective deterioration of spatial resolution. This study shows that if one substitutes the annular filter by one, adequately designed, shaded-mask filter, the sidelobes' strength is strongly reduced, and an important, effective improvement of resolution is achieved.

https://doi.org/10.1117/1.2345190