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RESEARCH PRODUCT
Mathematical modelling of the feed rod shape in floating zone silicon crystal growth
M. PlāteJanis VirbulisA. Krauzesubject
010302 applied physicsMaterials scienceSiliconbusiness.industryRotational symmetryTime evolutionPhase (waves)chemistry.chemical_element010103 numerical & computational mathematicsMechanicsCondensed Matter PhysicsRotation01 natural sciencesCondensed Matter::Soft Condensed MatterInorganic ChemistryMonocrystalline siliconCrystalOpticschemistry0103 physical sciencesMaterials ChemistryTransient (oscillation)0101 mathematicsbusinessdescription
Abstract A three-dimensional (3D) transient multi-physical model of the feed rod melting in the floating zone (FZ) silicon single-crystal growth process is presented. Coupled temperature, electromagnetic (EM), and melt film simulations are performed for a 4 inch FZ system, and the time evolution of the open melting front is studied. The 3D model uses phase boundaries and parameters from a converged solution of a quasi-stationary axisymmetric (2D) model of the FZ system as initial conditions for the time dependent simulations. A parameter study with different feed rod rotation, crystal pull rates and widths of the inductor main slit is carried out to analyse their influence on the evolution of the asymmetric feed rod shape. The feed rod rotation is shown to have a smoothing effect on the shape of the open melting front.
| year | journal | country | edition | language |
|---|---|---|---|---|
| 2017-01-01 | Journal of Crystal Growth |