6533b835fe1ef96bd129ecd2
RESEARCH PRODUCT
Low-frequency band gap in cross-like holey phononic crystal strip
Vincent LaudeShan JiangHongping Husubject
Materials scienceAcoustics and UltrasonicsSiliconBand gapchemistry.chemical_element02 engineering and technologySTRIPS01 natural scienceslaw.invention[SPI.MAT]Engineering Sciences [physics]/MaterialsCrystalResonatorlaw0103 physical sciencesExtremely low frequency[SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/MicroelectronicsElectronic band structure010302 applied physicsMicroelectromechanical systems[SPI.ACOU]Engineering Sciences [physics]/Acoustics [physics.class-ph]business.industry021001 nanoscience & nanotechnologyCondensed Matter PhysicsSurfaces Coatings and FilmsElectronic Optical and Magnetic MaterialschemistryOptoelectronics0210 nano-technologybusinessdescription
International audience; A silicon-based cross-like holey phononic crystal (PnC) strip is proposed for the control of elastic waves in the field of micro-electro-mechanical systems (MEMS). The goal is to obtain a broad bandgap at low frequencies with a lightweight structure. In this respect, the effects of varying the in-plane and the out-of-plane geometry parameters are discussed. After design, a gap-to-midgap ratio of 47% is obtained with an intermediate filling fraction of the solid material and a small thickness of the strip. The band gap can be moved to an extremely low frequency range while keeping the strip significantly smaller than previously reported PnC strips. The transmission property through a finite number of periods agrees well with the band structure of the infinite system. The proposed PnC strip could, for instance, be used as an isolating anchor for elastic wave resonators in MEMS.
| year | journal | country | edition | language |
|---|---|---|---|---|
| 2018-01-08 |