Electrical, chemical and morphological characterization of tantalum nitride thin film resistors deposited at low temperature by reactive sputtering for plastic electronic applications

6533b836fe1ef96bd12a0458

RESEARCH PRODUCT

Electrical, chemical and morphological characterization of tantalum nitride thin film resistors deposited at low temperature by reactive sputtering for plastic electronic applications

A. Scandurra G. F. Indelli Bruno Giuseppe Pignataro Salvatore Di Marco M. A. Di Stefano S. Ravesi S. Pignataro

subject

year	journal	country	edition	language
2007-01-01

10.1002/sia.2681 http://hdl.handle.net/10447/25086

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