6533b838fe1ef96bd12a3d7a

RESEARCH PRODUCT

Electron-phonon heat transport and electronic thermal conductivity in heavily doped silicon-on-insulator film

Mika PrunnilaJouni AhopeltoP. KivinenAlexandre SavinPäivi TörmäJukka P. PekolaM. Zgirski

subject

Materials scienceSiliconPhononphononsGeneral Physics and AstronomySilicon on insulatorchemistry.chemical_elementSubstrate (electronics)dopingsuperconductorsCondensed Matter::Materials ScienceThermal conductivityCondensed Matter::Superconductivitythermal conductivitySOICondensed matter physicsPhysicsDopingelectronsThermal conductionCondensed Matter::Mesoscopic Systems and Quantum Hall EffectWiedemann-Franz lawsilicon-on-insulatorchemistryelectron-phonon interactionssilicon dopingelemental semiconductorsWiedemann–Franz lawheat transportheavily doped semiconductors

description

Electron–phonon interaction and electronic thermal conductivity have been investigated in heavily doped silicon at subKelvin temperatures. The heat flow between electron and phonon systems is found to be proportional to T6. Utilization of a superconductor–semiconductor–superconductor thermometer enables a precise measurement of electron and substrate temperatures. The electronic thermal conductivity is consistent with the Wiedemann–Franz law. Peer reviewed

10.1063/1.1592627https://cris.vtt.fi/en/publications/4241b07c-4bbd-4c1c-98fe-1e27d58d726f