Development of MeV ion beam lithography technique for microfluidic applications

6533b838fe1ef96bd12a3fde

RESEARCH PRODUCT

Development of MeV ion beam lithography technique for microfluidic applications

subject

year	journal	country	edition	language
2011-01-01

http://urn.fi/URN:ISBN:978-951-39-4267-0

PEPhysical Sciences and Engineering
- PE2Fundamental Constituents of Matter
  - PE2_1Theory of fundamental interactions
  - PE2_2 Phenomenology of fundamental interactions
  - PE2_3Experimental particle physics with accelerators
  - PE2_4Experimental particle physics without accelerators
  - PE2_6Nuclear, hadron and heavy ion physics
  - PE2_8Gas and plasma physics
  - PE2_5Classical and quantum physics of gravitational interactions
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  - PE2_10Atomic, molecular physics
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  - PE2_16Non-linear physics
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- PE1Mathematics
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  - PE10_14Earth observations from space/remote sensing
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  - PE11_12Semi-conducting and magnetic materials engineering
  - PE11_13Metamaterials engineering
  - PE11_14Computational methods for materials engineering
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  - LS4_1Organ and tissue physiology and pathophysiology
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  - LS4_3Physiology of ageing
  - LS4_2Comparative physiology
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