6533b83afe1ef96bd12a78e7
RESEARCH PRODUCT
Observation of New Oscillatory Phenomena during the Electrochemical Anodization of Silicon
Eugenia MatveevaVitali Parkhutiksubject
Materials scienceSiliconAnodizingGeneral Chemical EngineeringIsotropyOxidechemistry.chemical_elementNanotechnologyElectrochemistryElectrochemical anodizationAnodechemistry.chemical_compoundchemistryChemical engineeringElectrochemistryGeneral Materials ScienceElectrical and Electronic EngineeringPhysical and Theoretical ChemistryPolarization (electrochemistry)description
This paper reports the observation of large undamped voltage oscillations during the anodic polarization of silicon in electrol yte containing a combination of acids. One of them stimulates oxide growth and the other its chemical dissolution (in the present c ase, (0.01-0.1 M H3PO4) + (0.001- 0.01 M HF). This temporal patterning of the anodization process is shown to be due to the formation of a thin (50-90 nm) oxide layer at the sample surface and its subsequent lifting-off. The mechanism of oxide detachment i s thought to be an isotropic growth of micropores at the oxide/silicon interface triggered on by changes of electrochemical condi tions there.
| year | journal | country | edition | language |
|---|---|---|---|---|
| 1999-01-01 | Electrochemical and Solid-State Letters |