0000000000006998

AUTHOR

Vitali Parkhutik

showing 3 related works from this author

Observation of New Oscillatory Phenomena during the Electrochemical Anodization of Silicon

1999

This paper reports the observation of large undamped voltage oscillations during the anodic polarization of silicon in electrol yte containing a combination of acids. One of them stimulates oxide growth and the other its chemical dissolution (in the present c ase, (0.01-0.1 M H3PO4) + (0.001- 0.01 M HF). This temporal patterning of the anodization process is shown to be due to the formation of a thin (50-90 nm) oxide layer at the sample surface and its subsequent lifting-off. The mechanism of oxide detachment i s thought to be an isotropic growth of micropores at the oxide/silicon interface triggered on by changes of electrochemical condi tions there.

Materials scienceSiliconAnodizingGeneral Chemical EngineeringIsotropyOxidechemistry.chemical_elementNanotechnologyElectrochemistryElectrochemical anodizationAnodechemistry.chemical_compoundchemistryChemical engineeringElectrochemistryGeneral Materials ScienceElectrical and Electronic EngineeringPhysical and Theoretical ChemistryPolarization (electrochemistry)Electrochemical and Solid-State Letters
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ChemInform Abstract: Observation of New Oscillatory Phenomena During the Electrochemical Anodization of Silicon.

2010

This paper reports the observation of large undamped voltage oscillations during the anodic polarization of silicon in electrol yte containing a combination of acids. One of them stimulates oxide growth and the other its chemical dissolution (in the present c ase, (0.01-0.1 M H3PO4) + (0.001- 0.01 M HF). This temporal patterning of the anodization process is shown to be due to the formation of a thin (50-90 nm) oxide layer at the sample surface and its subsequent lifting-off. The mechanism of oxide detachment i s thought to be an isotropic growth of micropores at the oxide/silicon interface triggered on by changes of electrochemical condi tions there.

chemistry.chemical_compoundSiliconchemistryChemical engineeringAnodizingIsotropyOxidechemistry.chemical_elementGeneral MedicinePolarization (electrochemistry)ElectrochemistryLayer (electronics)AnodeChemInform
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Mechanism of large oscillations of anodic potential during anodization of silicon in H3PO4/HF solutions

2000

Abstract Effect of large oscillations of electrical potential during anodic polarization of silicon in electrolytes composed of phosphoric and hydrofluoric acids has been reported. The oscillations last hours without damping if experimental conditions are optimal. Changes of temperature, anodic current density, intensity of stirring, etc. quench them or convert into less periodic ones. The oscillations are of very high amplitude (typically 15 V) with a period ranging from 18 to 30 s. Scanning electron microscopy (SEM)-imaging of the samples experiencing the oscillatory kinetic behaviour shows unambiguously that the stage of the anodic voltage growth is assisted by the formation of a thin (5…

Materials scienceSiliconPassivationAnodizingScanning electron microscopeMechanical EngineeringAnalytical chemistrychemistry.chemical_elementElectrolyteCondensed Matter Physicschemistry.chemical_compoundHydrofluoric acidchemistryMechanics of MaterialsChemical physicsGeneral Materials ScienceElectric potentialCurrent densityMaterials Science and Engineering: B
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