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RESEARCH PRODUCT
Structural and morphological characterization of the Cd-rich region in Cd1-xZnxO thin films grown by atmospheric pressure metal organic chemical vapour deposition
Elías MuñozMaria Del Carmen Martínez-tomásAdelaida Huerta-barberàVicente Muñoz-sanjoseEsther De PradoSaid Agouramsubject
010302 applied physicsMaterials scienceAtmospheric pressureAlloyMetals and AlloysCrystal growth02 engineering and technologySurfaces and InterfacesChemical vapor depositionengineering.material021001 nanoscience & nanotechnology01 natural sciencesSurfaces Coatings and FilmsElectronic Optical and Magnetic MaterialsMonocrystalline siliconChemical engineeringPhase (matter)0103 physical sciencesMaterials ChemistryengineeringThin film0210 nano-technologyWurtzite crystal structuredescription
Abstract We have analysed the growth, morphological and structural characterization of Cd1-xZnxO thin films grown on r-sapphire substrates by atmospheric pressure metal organic chemical vapour deposition, mainly focusing on the Cd-rich rock-salt phase for its promising optical and technological applications. The evolution of the surface morphology and crystalline properties as a function of Zn content has been studied by means of high resolution x-ray diffraction and electron microscopy techniques. Monocrystalline (002) single-phase cubic films were obtained with Zn contents up to 10.4%, and with a low density of dislocations as a consequence of the optimized crystal growth process. Particular attention has been paid to the alloy characterization for compositions when cubic and wurtzite phases coexist.
| year | journal | country | edition | language |
|---|---|---|---|---|
| 2019-08-01 | Thin Solid Films |