6533b856fe1ef96bd12b2499

RESEARCH PRODUCT

An Example of Ti:LiNbO3 Device Fabrication: The Mach-Zehnder Electrooptical Modulator

Giuseppe LulloP. Cusumano

subject

FabricationMaterials sciencebusiness.industryLithium niobatePhase (waves)chemistry.chemical_elementGyroscopeMach–Zehnder interferometerlaw.inventionWavelengthchemistry.chemical_compoundchemistrylawOptoelectronicsbusinessIntensity (heat transfer)Titanium

description

Integrated optics on LiNbO3 has already reached a stage of maturity. Several manufacturers are producing standard and custom devices on LiNbO3 such as high speed (up to 20 GHz) phase and intensity modulators, switching matrices, hybrid optical gyroscopes, etc.1. Two techniques are commonly used to fabricate these devices: titanium indiffusion for 1.3 and 1.5 μm wavelength operation and annealed proton exchange (APE) at 0.8 μm, due to its higher power handling capacity.

yearjournalcountryeditionlanguage
1994-01-01
https://doi.org/10.1007/978-1-4615-2566-0_13