6533b85cfe1ef96bd12bc86d
RESEARCH PRODUCT
Experimental and numerical investigation of laboratory crystal growth furnace for the development of model-based control of CZ process
Kristaps BergfeldsJanis VirbulisMihails PudzsA. Sabanskissubject
010302 applied physicsMaterials sciencebusiness.industryProcess (computing)Mechanical engineeringCrystal growth02 engineering and technology021001 nanoscience & nanotechnologyCondensed Matter Physicscomputer.software_genreProcess automation system01 natural sciencesAutomationSimulation softwareInorganic ChemistryCrystalMonocrystalline silicon0103 physical sciencesMaterials ChemistryTransient (oscillation)0210 nano-technologybusinesscomputerdescription
Abstract The presented study is focused on laboratory Czochralski crystal growth experiments and their mathematical modelling. The developed small-scale CZ crystal growth furnace is described as well as the involved automation systems: crystal radius detection by image recognition, temperature sensors, adjustable heater power and crystal pull rate. The CZ-Trans program is used to model the experimental results – transient, 2D axisymmetric simulation software primarily used for modelling of the industrial-scale silicon crystal growth process. Poor agreement with the experimental results is reached; however, the proven ability to perform affordable, small-scale experiments and successfully model their transient behavior, creates a possibility to develop new process automation solutions in the future.
| year | journal | country | edition | language |
|---|---|---|---|---|
| 2019-09-01 | Journal of Crystal Growth |