6533b85dfe1ef96bd12bf287
RESEARCH PRODUCT
Microrefrigeration by quasiparticle tunnelling in NIS and SIS junctions
M. M. LeivoJ. K. SuoknuutiB CollaudinK ArutyunovT. I. SuppulaAntti ManninenJukka P. Pekolasubject
SuperconductivityMaterials scienceCondensed matter physicsPhysics::Instrumentation and DetectorsPhysics::OpticsDielectricCondensed Matter PhysicsElectronic Optical and Magnetic Materialslaw.inventionComputer Science::OtherSurface micromachiningchemistry.chemical_compoundNanolithographySilicon nitridechemistrylawCondensed Matter::SuperconductivityQuasiparticleElectrical and Electronic EngineeringQuantum tunnellingElectron coolingdescription
Abstract A solid-state refrigeration method at sub-kelvin temperatures has been developed. It is based on quasiparticle tunnelling between a superconductor and a normal metal, or, between two dissimilar superconducting metals. The refrigerator is fabricated by combining nanolithography and micromachining methods. This technique has been demonstrated in both electron cooling from 0.3 to 0.1 K and in refrigeration of a dielectric platform. We describe a new fabrication method of tunnel junctions in a shadow evaporation configuration using a mechanical mask of silicon nitride.
| year | journal | country | edition | language |
|---|---|---|---|---|
| 2000-05-11 |