Validation of mathematical model for CZ process using small-scale laboratory crystal growth furnace

6533b85ffe1ef96bd12c1a8d

RESEARCH PRODUCT

Validation of mathematical model for CZ process using small-scale laboratory crystal growth furnace

Janis Virbulis A. Sabanskis Kristaps Bergfelds

subject

010302 applied physics Materials science Scale (ratio)Mechanical engineering Crystal growth 02 engineering and technology 021001 nanoscience & nanotechnology computer.software_genre 01 natural sciences Simulation software Monocrystalline silicon Scientific method 0103 physical sciences Transient (oscillation)0210 nano-technology Material properties computer

description

The present material is focused on the modelling of small-scale laboratory NaCl-RbCl crystal growth furnace. First steps towards fully transient simulations are taken in the form of stationary simulations that deal with the optimization of material properties to match the model to experimental conditions. For this purpose, simulation software primarily used for the modelling of industrial-scale silicon crystal growth process was successfully applied. Finally, transient simulations of the crystal growth are presented, giving a sufficient agreement to experimental results.

year	journal	country	edition	language
2018-05-01	IOP Conference Series: Materials Science and Engineering

https://doi.org/10.1088/1757-899x/355/1/012004

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