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RESEARCH PRODUCT
Sensing properties of ZnO nanostructured layers
Lluis M. GuiaVicente Muñoz-sanjoséCandid ReigSergio AranaPedro J. Rodriguez-cantosubject
Resistive touchscreenMaterials scienceCapacitive sensingHumiditychemistry.chemical_elementZincCapacitanceSpray pyrolysisSemiconductorschemistryElectrodeElectronic engineeringRelative humidityMaterials nanoestructuratsComposite materialdescription
Nanostructured ZnO layers have been deposited onto SiO 2 /Si substrates by spray pyrolysis, with previously patterned interdigitated gold electrodes. We have then measured the capacitive and resistive response against ambient parameters such as relative humidity and illumination.
| year | journal | country | edition | language |
|---|---|---|---|---|
| 2017-02-01 | 2017 Spanish Conference on Electron Devices (CDE) |