6533b86efe1ef96bd12cca1a
RESEARCH PRODUCT
Monitoring the Etching Process in LPFGs towards Development of Highly Sensitive Sensors
Francisco J. ArreguiIgnacio R. MatiasSilvia DiazJose L. CruzJesus M. CorresIgnacio Del VillarAbian B. Socorrosubject
CouplingMaterials sciencerefractive indexbusiness.industryProcess (computing)Refractive indexResonancelcsh:ALong-period fiber gratingLong period fiber gratingCladding modeoptic fibre sensorOpticsEtchingEtching (microfabrication)etchingSensitivity (control systems)lcsh:General WorksbusinessOptic fibre sensorRefractive indexlong period fiber gratingdescription
Trabajo presentado en la Eurosensors 2017 Conference. París, 3–6 de septiembre de 2017. In this work, the monitoring of the etching process up to a diameter of 30 µm of two LPFG structures has been compared, one of them had initially 125 µm, whereas the second one had 80 µm. By tracking the wavelength shift of the resonance bands during the etching process it is possible to check the quality of etching process (the 80 µm fibre performs better than de 125 µm fibre), and to stop for a specific cladding mode coupling, which permits to obtain an improved sensitivity compared to the initial structure. This work was supported by the Spanish Agencia Estatal de Investigación (AEI) and Fondo Europeo de Desarrollo Regional (FEDER) TEC2016-78047-R and by the Government of Navarre through its projects with references: 2016/PI008, 2016/PC025 and 2016/PC026.
| year | journal | country | edition | language |
|---|---|---|---|---|
| 2017-01-01 | Proceedings |