Amorphous As–S–Se semiconductor resists for holography and lithography

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Amorphous As–S–Se semiconductor resists for holography and lithography

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Materials science business.industry Chalcogenide Holography Condensed Matter Physics Diffraction efficiency Electronic Optical and Magnetic Materials Amorphous solid law.invention chemistry.chemical_compound Semiconductor Optics chemistry Resist law Materials Chemistry Ceramics and Composites Optoelectronics Thin film business Lithography

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Abstract The photo- and electron-beam induced changes in solubility of thin films of the amorphous chalcogenide semiconductors As–S–Se and As 2 S 3 have been studied. The possibilities of practical application of these materials as resists for the production of relief holograms and holographic optical elements are discussed. It is shown that the self-enhancement (SE) phenomenon of holographic recording in amorphous chalcogenide semiconductor films by light or thermal treatment can be used to increase the diffraction efficiency (DE) of the holograms.

year	journal	country	edition	language
2002-04-01	Journal of Non-Crystalline Solids

https://doi.org/10.1016/s0022-3093(01)01126-7

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