6533b871fe1ef96bd12d17b8

RESEARCH PRODUCT

Quasi-Static Displacement Self-Sensing Measurement for a 2-DOF Piezoelectric Cantilevered Actuator

Ioan Alexandru IvanMicky RakotondrabeJoël AgnusOmar AljanaidehPhilippe Lutz

subject

0209 industrial biotechnologyEngineeringCantileverObserver (quantum physics)business.industry020208 electrical & electronic engineering02 engineering and technologyPiezoelectricityDisplacement (vector)law.invention020901 industrial engineering & automationControl and Systems EngineeringlawCascadeControl theoryElectrical network0202 electrical engineering electronic engineering information engineeringElectrical and Electronic EngineeringActuatorbusinessQuasistatic process

description

This paper proposes a self-sensing measurement technique to perform the precise estimation of the displacements along two axes in a two-degrees-of-freedom (2-DOF) piezoelectric actuator. For that, a new electrical circuit scheme that permits charge amplification is first proposed to match the different electrodes combination of the 2-DOF actuator. Then, a new bivariable observer that precisely estimates the displacements is calculated and implemented experimentally in a cascade with the electrical circuit to complete the self-sensing. The experimental tests and results verification with external sensors revealed that the measured displacements given by the developed self-sensing measurement technique derive better than a micron of precision which well fits to micromanipulation applications. Discussion about the features and the performances improvement perspectives of the suggested approach are presented at the end of the paper.

yearjournalcountryeditionlanguage
2017-08-01IEEE Transactions on Industrial Electronics
https://doi.org/10.1109/tie.2017.2677304