Search results for "Lithography"
showing 10 items of 242 documents
SU-8 viļņvadu izveide ar tiešā ieraksta lāzera litogrāfijas tehniku un to optisko īpašību raksturošana
2016
Kopš 20.gs. beigām lieli pūliņi ieguldīti telekomunikāciju attīstībā, arvien tiek meklēti jauni materiāli, lai aizvietotu elektroniskās komponentes integrētajās shēmās, jo tās ir ierobežojošais faktors informācijas pārvades ātrumam. Viens no risinājumiem būtu veidot shēmas, kas satur tikai optiskās komponentes. Optisko komponenšu pamatā ir viļņvadi, kuriem jābūt ar noteiktām optiskām īpašībām. Viena no perspektīvākajām materiālu klasēm pielietojumiem fotoniskās integrālās shēmās ir organiskie materiāli. Darbā aprakstīta tīru un funkcionalizētu organisku SU 8 viļņvadu izgatavošana ar tiešā ieraksta lāzera litogrāfijas tehniku. Ir aprakstīti viļņvadu izgatavošanas soļi un metodes ierobežojumi…
Comparison between Focused Electron/Ion Beam-Induced Deposition at Room Temperature and under Cryogenic Conditions
2019
This article belongs to the Special Issue Multi-Dimensional Direct-Write Nanofabrication.
Reduction-oxidation dynamics of oxidized graphene: Functional group composition dependent path to reduction
2018
Micrometer-sized oxidation patterns containing varying composition of functional groups including epoxy, ether, hydroxyl, carbonyl, carboxyl, were created in chemical vapor deposition grown graphene through scanning probe lithography and pulsed laser two-photon oxidation. The oxidized graphene films were then reduced by a focused x-ray beam. Through in-situ x-ray photoelectron spectroscopy measurement, we found that the path to complete reduction depends critically on the total oxygen coverage and concentration of epoxy and ether groups. Over the threshold concentrations, a complex reduction-oxidation process involving conversion of functional groups of lower binding energy to higher bindin…
Studies of two-dimensional and three-dimensional phononic crystal structures
2016
This thesis focuses on studying phononic crystal structures. More specifically, it is aimed at fabrication and measurement of thermal properties of two-dimensional (2D) periodic microstructures and three-dimensional (3D) nanostructures. There is great interest in understanding, manipulating and considering application perspective of minimizing of thermal transport in periodic structures. Periodic structures have been studied more on their optical properties, but this thesis places emphasis on their application of manipulating heat. A process of fabricating two-dimensional hole array phononic (2D PnC) structures is described here. It consists of membrane preparation, superconductor-insulator…
Fabrication techniques for developing a functional microfluidic glass device suitable for detection in optical spectroscopy system
2012
Microfluidic devices offer the chance to manipulate and analyze fluids including bioassays and chemical reactions. In this study, a method to develop a microfluidic analysis system is proposed for detection of nanotubes by a Raman acquisition setup. Microchannels where fabricated in sodalime glass substrate by MeV ion beam lithography or electron beam lithography and wet etching. Fusion bonding (550 °C) was used to seal the microchannels. As a result a prototype microfluidic device with 1.6 µm deep channel that exhibit efficient sealing and suitable channel geometry was obtained. The microfluidic device was tested in a Raman spectroscopy detection system and the collected spectra showed the…
Exploring integration prospects of opal-based photonic crystals
2003
Different methods of functionalisation of thin opal films are discussed, including synthesis of opals on pre-patterned substrates, post-synthesis electron beam lithography, preparation of opals with heterogeneous photonic band gap structure and integrating opals with light sources. These approaches have been tested experimentally and key technological problems have been identified.
Toward Quaternary QCA : Novel Majority and XOR Fuzzy Gates
2022
As an emerging nanotechnology, quantum-dot cellular automata (QCA) has been considered an alternative to CMOS technology that suffers from problems such as leakage current. Moreover, QCA is suitable for multi-valued logic due to the simplicity of implementing fuzzy logic in a way much easier than CMOS technology. In this paper, a quaternary cell is proposed with two isolated layers because of requiring three particles to design this quaternary cell. Moreover, due to the instability of the basic gates, the three particles cannot be placed in one layer. The first layer of the proposed two-layer cell includes a ternary cell and the second one includes a binary cell. It is assumed that the over…
Rayleigh-instability-driven dewetting of thin Au and Ag films on indium-tin-oxide surface under nanosecond laser irradiations
2013
Investigations have been carried out on laser-beam-induced nanoparticle (NP) formation in thin (5 nm) Au and Ag films on indium-tin-oxide substrate. After the irradiation the films were observed to break-up into NPs through a dewetting mechanism. This mechanism was investigated as a Rayleigh-instability- driven process. In fact, for each used laser fluence, the resulting Au and Ag NPs' mean size and surface-to-surface mean distance were quantified and correlated between them in the framework of the Rayleigh-instability theory showing an excellent agreement. © The Institution of Engineering and Technology 2013.
Superconducting tunnel junction fabrication on three-dimensional topography based on direct laser writing
2020
Superconducting junctions are widely used in a multitude of applications ranging from quantum information science and sensing to solidstate cooling. Traditionally, such devices must be fabricated on flat substrates using standard lithographic techniques. In this study, we demonstrate a highly versatile method that allows for superconducting junctions to be fabricated on a more complex topography. It is based on maskless direct laser writing and two-photon lithography, which allows writing in 3D space. We show that high-quality normal metal–insulator–superconductor tunnel junctions can be fabricated on top of a 20-lm-tall three-dimensional topography. Combined with conformal resist coating m…
High speed microfluidic prototyping by programmable proximity aperture MeV ion beam lithography
2013
Abstract Microfluidics refers to the science and technology for controlling and manipulating fluids that flow along microchannels. For the development of complex prototypes, many microfluidic test structures are required first. Normally, these devices are fabricated via photolithography. This technique requires a photomask for transferring a pattern to photoresists by exposing with UV light. However, this method can be slow when a new structure is required to change. This is because a series of photomasks are needed, which is time consuming and costly. Here, we present a programmable proximity aperture lithography (PPAL) technique for the development of microfluidic prototype in poly(methyl…