Search results for "PLASMA"

The effect of gas mixing and biased disc voltage on the preglow transient of electron cyclotron resonance ion source

2012

The effect of gas mixing and biased disc voltage on the preglow of electron cyclotron resonance ion source plasma has been studied with the AECR-U type 14 GHz ion source. It was found that gas mixing has a significant effect on the preglow. The extracted transient beam currents and efficiency of the heavier species increase, while the currents and efficiency of the lighter species decrease when gas mixing is applied. The effect of the biased disc was found to be pronounced in continuous operation mode in comparison to preglow. The data provide information on the time scales of the plasma processes explaining the effects of gas mixing and biased disc. The results also have implications on pr…

Microwave emission from ECR plasmas under conditions of two-frequency heating induced by kinetic instabilities

2018

Multiple frequency heating is one of the most effective techniques to improve the performances of ECR ion sources. It has been demonstrated that the appearance of the periodic ion beam current oscillations in ECRIS at high heating power and low magnetic field gradient is associated with kinetic plasma instabilities. Recently it was proven that one of the main features of multiple frequency heating is connected with stabilizing effect, namely the suppression of electron cyclotron instability in ECRIS plasmas. Due to this kind of stabilization it is possible to run the ion source in stable mode using higher total microwave power and thus to obtain better ion beam parameters. Unfortunately, ev…

The extraction of negative carbon ions from a volume cusp ion source

2017

Acetylene and carbon dioxide gases are used in a filament-powered volume-cusp ion source to produce negative carbon ions for the purpose of carbon implantation for gettering applications. The beam was extracted to an energy of 25 keV and the composition was analyzed with a spectrometer system consisting of a 90° dipole magnet and a pair of slits. It is found that acetylene produces mostly C−2 ions (up to 92 µA), while carbon dioxide produces mostly O− with only trace amounts of C−. Maximum C−2 current was achieved with 400 W of arc power and, the beam current and composition were found to be highly dependent on the pressure in the source. The beam properties as a function of source settings…

Electron cyclotron resonance ion source plasma chamber studies using a network analyzer as a loaded cavity probe

2012

A method and first results utilizing a network analyzer as a loaded cavity probe to study the resonance properties of a plasma filled electron cyclotron resonance ion source (ECRIS) plasma chamber are presented. The loaded cavity measurements have been performed using a dual port technique, in which two separate waveguides were used simultaneously. One port was used to ignite and sustain the plasma with a microwave source operating around 11 GHz and the other was used to probe the cavity properties with the network analyzer using a frequency range around 14 GHz. The first results obtained with the JYFL 14 GHz ECRIS demonstrate that the presence of plasma has significant effects on the reson…

Investigation into the gas mixing effect in ECRIS plasma using Kα and optical diagnostics

2018

Mixing a lighter gas species into the plasma of an ECRIS is known to enhance high charge state production of the heavier gas species. With this investigation, Kα diagnostics, optical emission spectroscopy and the measured charge state distribution of the extracted beam were combined to shed more light on the physics governing this phenomenon. Kα diagnostics data from two ion sources, the JYFL 14 GHz ECRIS and the GTS at iThemba LABS, are presented to gain confidence on the observed trends. The results seem to favor ion cooling as the most likely mechanism responsible for the favorable influence of the gas mixing.Mixing a lighter gas species into the plasma of an ECRIS is known to enhance hi…

Plasma etch characteristics of aluminum nitride mask layers grown by low-temperature plasma enhanced atomic layer deposition in SF6 based plasmas

2012

The plasma etch characteristics of aluminum nitride (AlN) deposited by low-temperature, 200 °C, plasma enhanced atomic layer deposition (PEALD) was investigated for reactive ion etch (RIE) and inductively coupled plasma-reactive ion etch (ICP-RIE) systems using various mixtures of SF6 and O2 under different etch conditions. During RIE, the film exhibits good mask properties with etch rates below 10r nm/min. For ICP-RIE processes, the film exhibits exceptionally low etch rates in the subnanometer region with lower platen power. The AlN film’s removal occurred through physical mechanisms; consequently, rf power and chamber pressure were the most significant parameters in PEALD AlN film remova…

AlN Ceramics from Nanosized Plasma Processed Powder, its Properties and Application

2014

Mode-coupling theory of the glass transition for confined fluids

2012

We present a detailed derivation of a microscopic theory for the glass transition of a liquid enclosed between two parallel walls relying on a mode-coupling approximation. This geometry lacks translational invariance perpendicular to the walls, which implies that the density profile and the density-density correlation function depends explicitly on the distances to the walls. We discuss the residual symmetry properties in slab geometry and introduce a symmetry adapted complete set of two-point correlation functions. Since the currents naturally split into components parallel and perpendicular to the walls the mathematical structure of the theory differs from the established mode-coupling eq…

Universality for the breakup of invariant tori in Hamiltonian flows

1998

In this article, we describe a new renormalization-group scheme for analyzing the breakup of invariant tori for Hamiltonian systems with two degrees of freedom. The transformation, which acts on Hamiltonians that are quadratic in the action variables, combines a rescaling of phase space and a partial elimination of irrelevant (non-resonant) frequencies. It is implemented numerically for the case applying to golden invariant tori. We find a nontrivial fixed point and compute the corresponding scaling and critical indices. If one compares flows to maps in the canonical way, our results are consistent with existing data on the breakup of golden invariant circles for area-preserving maps.

An operatorial description of desertification

2016

We propose a simple theoretical model for desertification processes based on three actors (soil, seeds, and plants) on a two-dimensional lattice. Each actor is described by a time dependent fermionic operator, and the dynamics is ruled by a self-adjoint Hamilton-like operator. We show that even taking into account only a few parameters, accounting for external actions on the ecosystem or the response to positive feedbacks, the model provides a plausible description of the desertification process, and can be adapted to different ecological landscapes. We first describe the simplified model in one cell. Then, we define the full model on a two-dimensional region, taking into account additional…