Search results for "Transition Edge Sensor"

Transition-edge sensor array development

2009

Large 256-Pixel X-ray Transition-Edge Sensor Arrays With Mo/TiW/Cu Trilayers

2015

We describe the fabrication and electrical characterization of 256-pixel X-ray transition-edge sensor (TES) arrays intended for materials analysis applications. The processing is done on 6-in wafers, providing capabilities on a commercial scale. TES films were novel proximity coupled Mo/TiW/Cu trilayers, where the thin TiW layer in between aims to improve the stability of the devices by preventing unwanted effects such as Mo/Cu interdiffusion. The absorber elements were electrodeposited gold of thickness 2 μm. The single-pixel design discussed here is the so-called Corbino geometry. Most design goals were successfully met, such as the critical temperature, thermal time constant, and transit…

Minimum detection limits and applications of proton and helium induced X-ray emission using transition-edge sensor array

2017

Abstract We have determined minimum detection limits, MDLs, for elements 14 ⩽ Z ⩽ 86 using a transition-edge sensor array, TES array, and as a comparison using an Amptek X-123SDD silicon drift detector, SDD. This was done using a 3 MeV proton beam and a 5.1 MeV helium beam. MDLs were determined for a thin film sample on top of C substrate, and for a bulk sample containing mostly Al. Due to the higher peak-to-background ratio, lower detection limits were obtainable using the TES array for most of the elements. However, for elements 30 ⩽ Z ⩽ 45 the performance of the TES array was not as good as the SDD performance. This is due to the limitations of the TES used at energies >10 keV. The great…