Search results for "fabrication"
showing 10 items of 460 documents
Time-resolved FDTD and experimental FTIR study of gold micropatch arrays for wavelength-selective mid-infrared optical coupling
2021
The work was partially supported by Sweden's innovation agency Vinnova (Large area CVD graphene-based sensors/IR-photodetectors 2020-00797) and EU CAMART2 project (European Union's Horizon 2020 Framework Programme H2020-WIDESPREAD-01-2016-2017-TeamingPhase2 under grant agreement No.739508). TY acknowledges European Regional Development Fund Project No. 1.1.1.2/VIAA/4/20/740.
Stable proton exchanged waveguides in Lithium Tantalate
2008
alpha, beta(1), and kappa(2) phases are investigated for planar waveguide fabrication by proton exchange in congruent lithium tantalate. The effective indices of planar waveguide eigenmodes were monitored over time, revealing that the exchange process induces aging instabilities in all phases except alpha.
Direct Writing of Channels for Microfluidics in Silica by MeV Ion Beam Lithography
2011
The lithographic exposure characteristic of amorphous silica (SiO2) was investigated for 6.8 MeV16O3+ions. A programmable proximity aperture lithography (PPAL) technique was used for the ion beam exposure. After exposure, the exposed pattern was developed by selective etching in 4% v/v HF. Here, we report on the development of SiO2in term of the etch depth dependence on the ion fluence. This showed an exponential approach towards a constant asymptotic etch depth with increasing ion fluence. An example of microfluidic channels produced by this technique is demonstrated.
Plasma etch characteristics of aluminum nitride mask layers grown by low-temperature plasma enhanced atomic layer deposition in SF6 based plasmas
2012
The plasma etch characteristics of aluminum nitride (AlN) deposited by low-temperature, 200 °C, plasma enhanced atomic layer deposition (PEALD) was investigated for reactive ion etch (RIE) and inductively coupled plasma-reactive ion etch (ICP-RIE) systems using various mixtures of SF6 and O2 under different etch conditions. During RIE, the film exhibits good mask properties with etch rates below 10r nm/min. For ICP-RIE processes, the film exhibits exceptionally low etch rates in the subnanometer region with lower platen power. The AlN film’s removal occurred through physical mechanisms; consequently, rf power and chamber pressure were the most significant parameters in PEALD AlN film remova…
A holistic approach to design for 4D Printing
2019
Invented in 1983, as a rapid prototyping process, additive manufacturing (AM) is nowadays considered as a manufacturing process almost in the same way as conventional processes. For example, parts obtained by AM are found in aircraft structures. This AM evolution is mainly due to the shape complexity allowed by the process. The driving forces behind this evolution include: the development of various techniques on the layer-wise manufacturing principle and the improvement both in quantity and quality of the range of materials that can be processed. Many other AM techniques and materials continue to emerge. In the wake of the AM (usually referred to as 3D printing) another mode of manufacturi…
Ionic Transport through Chemically Functionalized Hydrogen Peroxide-Sensitive Asymmetric Nanopores
2015
We describe the fabrication of a chemical-sensitive nanofluidic device based on asymmetric nanopores whose transport characteristics can be modulated upon exposure to hydrogen peroxide (H2O2). We show experimentally and theoretically that the current-voltage curves provide a suitable method to monitor the H2O2-mediated change in pore surface characteristics from the electronic readouts. We demonstrate also that the single pore characteristics can be scaled to the case of a multipore membrane whose electric outputs can be readily controlled. Because H2O2 is an agent significant for medical diagnostics, the results should be useful for sensing nanofluidic devices.
A polarimetric sensor based on nanoporous free standing membranes
2012
A polarimetric sensor with state of the art sensitivity is developed using free standing porous silicon membranes. The use of an optimized etching receipt greatly reduces the pore roughness. Depolarization factors are thus limited and material birefringence is increased. Free standing membranes are fabricated in n-type substrates and characterized both from the optical and structural point of view. The proposed approach is fully CMOS compatible and can therefore pave the way to the development of cheap microarray that exploits multiplexing capabilities while keeping the amount of analyte required by the analysis down to the microliter level.
Mechanical Bistable Structures for Microrobotics and Mesorobotics from Microfabrication to Additive Manufacturing
2018
International audience; The use of mechanical bistable structures in the design of microrobots and mesorobots has many advantages especially for flexible robotic structures. However, depending on the fabrication technology used, the adequacy of theoretical and experimental mechanical behaviors can vary widely. In this paper, we present the manufacturing results of bistable structures made with two extensively used contemporary technologies: MEMS and FDM additive manufacturing. Key issues of these fabrication technologies are discussed in the context of microrobotics and mesorobotics applications.
Effects of Metal-Organic Chemical Vapour Deposition grown seed layer on the fabrication of well aligned ZnO nanorods by Chemical Bath Deposition
2011
Well aligned, long and uniform ZnO nanorods have been reproducibly fabricated adopting a two-steps Metal-Organic Chemical Vapour Deposition (MOCVD) and Chemical Bath Deposition (CBD) fabrication approaches. Thin (<100 nm) ZnO buffer layers have been seeded on silicon substrates by MOCVD and ZnO layers have been subsequently grown, in form of well textured nanorods, using CBD. It has been found that the structure and thickness of the seed layer strongly influence the final morphology and the crystal texturing of ZnO nanorods as well as the CBD growth rate. There is, in addition, a strong correlation between morphologies of CBD grown ZnO nanorods and those of the seed layer underneath. Thus, …
Performance of Thin-Film Lithium Energy Cells under Uniaxial Pressure
2008
The objective of this study was two-fold. The first objective was to determine if the all-solid-state thin-film lithium energy cells could withstand the minimal 550 kPa uniaxial pressure required for composite manufacturing, which both specimens successfully did. The second objective was to determine the upper boundary uniaxial pressure limit of operation for the all-solid-state thin-film lithium energy cells. The two all-solid- state thin-film lithium energy cells tested in the present study under uniaxial pressure performed well even when subjected to uniaxial pressures up to about 2.0 MPa. However, pressures higher than this value led to their degradation. The observed degradation was du…