Search results for "microfabric"
showing 10 items of 67 documents
A polarimetric sensor based on nanoporous free standing membranes
2012
A polarimetric sensor with state of the art sensitivity is developed using free standing porous silicon membranes. The use of an optimized etching receipt greatly reduces the pore roughness. Depolarization factors are thus limited and material birefringence is increased. Free standing membranes are fabricated in n-type substrates and characterized both from the optical and structural point of view. The proposed approach is fully CMOS compatible and can therefore pave the way to the development of cheap microarray that exploits multiplexing capabilities while keeping the amount of analyte required by the analysis down to the microliter level.
Mechanical Bistable Structures for Microrobotics and Mesorobotics from Microfabrication to Additive Manufacturing
2018
International audience; The use of mechanical bistable structures in the design of microrobots and mesorobots has many advantages especially for flexible robotic structures. However, depending on the fabrication technology used, the adequacy of theoretical and experimental mechanical behaviors can vary widely. In this paper, we present the manufacturing results of bistable structures made with two extensively used contemporary technologies: MEMS and FDM additive manufacturing. Key issues of these fabrication technologies are discussed in the context of microrobotics and mesorobotics applications.
Muscular MEMS—the engineering of liquid crystal elastomer actuators
2016
A new class of soft-matter actuator, the liquid crystal elastomer (LCE), shows promise for application in a wide variety of mechanical microsystems. Frequently referred to as an 'artificial muscle', this family of materials exhibits large actuation stroke and generates considerable force, in a compact form which may easily be combined with the structures and devices commonly used in microsystems and MEMS. We show here how standard microfabrication techniques may be used to integrate LCEs into mechanical microsystems and present an in-depth analysis of their mechanical and actuation properties. Using an example from micro-optics and optical MEMS, we demonstrate that their performance and fle…
MEMS analogous micro-patterning of thermotropic nematic liquid crystalline elastomer films using a fluorinated photoresist and a hard mask process
2017
In this work, we present a method to pattern liquid crystal elastomers (LCEs) in the micrometer range without using any mechanical processing steps to prepare micron sized LCE actuators compatible with microelectromechanical system (MEMS) technology. Multi-layer spin-coating processes are developed to synthesise and structure 300–3500 nm thick LCE films. A water soluble sacrificial layer, a photoalignment layer and a LCE formulation, which is polymerised and crosslinked in its liquid crystal phase, are spin-coated successively onto a substrate. A fluorinated photoresist layer is used to structure LCE films with thicknesses up to 700 nm in a photolithographic and etching process. For thicker…
Reverberation reduction in capacitive micromachined ultrasonic transducers (CMUTs) by front-face reflectivity minimization
2015
Abstract Front-face acoustic reflectivity of ultrasonic imaging transducers, due to acoustic impedance mismatch with the propagation medium, may cause reverberation phenomena during wideband pulse-echo operation. Front-face reflectivity may be reduced by promoting the transmission of the echoes, received from the medium, to the transducer backing, and by maximizing the mechanical-to-electrical energy conversion and dissipation by tuning the electrical load impedance connected to the transducer. In Capacitive Micromachined Ultrasonic Transducers (CMUTs), the energy transfer from the medium to the backing is very low due to the large impedance mismatch between the medium and the transducer su…
Evaluation of the enamel etching pattern of self-etching adhesives
2010
Objectives: To evaluate the capacity of seven self-etching adhesives (SEAs) to demineralize ground enamel in comparison with traditional phosphoric acid etchant (PAE) using SEM and statistical analysis. Materials and methods: 80 caries-free extracted human third molars were divided into 8 groups ( n = 10). Enamel bur-cut surfaces were prepared and, strictly following the manufacturers’ instructions, treated with three priming agents of two-step self-etching adhesives: Aqua Resulcin Prime (Group 1); Peak™ (Group 2); Clearfil Protect Bond (Group 3); four one-step self-etch (all-in-one) adhesives, G-Bond (Group 4); Artegral One (Group 5); Clearfil S3 Bond (Group 6); Adper Easy Bond (Group 7); …
Marginal quality of a full-body bulk-fill composite placed with an universal adhesive system in etch-and-rinse and self-etch mode: An
2020
Background Marginal seal of a nanohybrid bulk-fill composite compared to a nanohybrid conventional composite, using a universal adhesive (UA) applied in etch-and-rinse (ER) and self-etch (SE) mode was investigated. Material and Methods Thirty-six intact molars were selected and two standardized cavities in each tooth were prepared and allocated into four groups according to restorative material and etching strategy. All samples were placed in a 1% methylene blue solution for 24 h, then cut in the middle of the restorations obtaining two parts (n=144) and used for microscopic evaluation (50x) for dye penetration measurements. Results The data were analysed by ANOVA and Tukey post-hoc test (p…
Morphology Study of the Porosity of the GaP Surface Layer Formed on the Surface of a Single Crystal by Electrochemical Etching
2021
The article analyzes the morphological characteristics of a porous GaP surface layer formed on the surface of monocrystalline gallium phosphide by electrochemical etching. The correlations between the etching time and the appropriate size, shape and density of pores have been established and studied in detail.
Investigation of heavy ion tracks in LiF crystals by dislocation mobility method
2008
Abstract The track damage created in LiF by swift heavy ions was studied using methods of dislocation mobility and track etching. The crystals were irradiated with Bi and Pb ions of a specific energy of 11 MeV/u at fluences between 10 7 and 10 10 cm −2 . The measurements on cross-sections cleaved parallel to the irradiated surface showed continuity of the track etching for the depth up to 70% of the ion range. In deeper layers, numerous etch pits had a flat-bottomed shape indicating the discontinuities of the track structure. At this stage, a decrease of the ion-induced effect in dislocation mobility was observed. The observed reduction of the efficiency of ion tracks as obstacles for disl…
Thin film growth into the ion track structures in polyimide by atomic layer deposition
2017
Abstract High-aspect ratio porous structures with controllable pore diameters and without a stiff substrate can be fabricated using the ion track technique. Atomic layer deposition is an ideal technique for depositing thin films and functional surfaces on complicated 3D structures due to the high conformality of the films. In this work, we studied Al2O3 and TiO2 films grown by ALD on pristine polyimide (Kapton HN) membranes as well as polyimide membranes etched in sodium hypochlorite (NaOCl) and boric acid (BO3) solution by means of RBS, PIXE, SEM-EDX and helium ion microcopy (HIM). The focus was on the first ALD growth cycles. The areal density of Al2O3 film in the 400 cycle sample was det…