0000000000041072

AUTHOR

Patrick Philipp

0000-0001-5219-5178

showing 2 related works from this author

Erratum: De Teresa, J.M. et al. Comparison between Focused Electron/Ion Beam-Induced Deposition at Room Temperature and under Cryogenic Conditions. M…

2020

In Section 3 [...]

n/aMaterials scienceIon beamControl and Systems Engineeringlcsh:Mechanical engineering and machineryMechanical EngineeringAnalytical chemistrylcsh:TJ1-1570ElectronElectrical and Electronic EngineeringDeposition (chemistry)Micromachines
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Comparison between Focused Electron/Ion Beam-Induced Deposition at Room Temperature and under Cryogenic Conditions

2019

This article belongs to the Special Issue Multi-Dimensional Direct-Write Nanofabrication.

focused ion beamMaterials scienceIon beamlcsh:Mechanical engineering and machinery02 engineering and technologyReview01 natural sciencesFocused ion beamIoncircuit editelectrical contacts0103 physical sciencesfocused ion beam-induced depositionDeposition (phase transition)lcsh:TJ1-1570Electrical and Electronic EngineeringThin filmLithographyFocused ion beam-induced deposition010302 applied physicsFocused ion beamNanowiresbusiness.industryMechanical Engineering021001 nanoscience & nanotechnologyElectrical contactsfocused electron beam-induced depositionFocused electron beam-induced depositionthin filmsnanowiresControl and Systems EngineeringOptoelectronicslithographyErratum0210 nano-technologybusinessLayer (electronics)Micromachines
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