0000000000059943
AUTHOR
Martin Kilo
Oxygen Diffusion in Alumina. Application to Synthetic and Thermally Grown Al<sub>2</sub>O<sub>3</sub>
S. Chevalier, B. Lesage, C. Legros, G. Borchardt, G. Strehl, M. Kilo Laboratoire de Recherches sur la Reactivite des Solides, CNRS UMR 5613, Universite de Bourgogne, F-21078 Dijon, France Laboratoire d’Etudes des Materiaux Hors Equilibre, CNRS UMR 8647, Universite Paris XI, F-91405 Orsay, France. Institut fur Metallurgie, TU Clausthal, Robert Koch Strasse 42, D38678 Clausthal-Zellerfeld, Germany. * sebastien.chevalier@u-bourgogne.fr
MOCVD deposition of YSZ on stainless steels
Abstract Yttria stabilized zirconia was deposited on stainless steel using the metal–organic chemical vapor deposition (MOCVD) technique, from β-diketonate precursors. The variation of the evaporation temperatures of yttrium and zirconium precursor allowed to control the level of Y within the film. Over the temperature range 125–150 °C, the Y content increased from 2.5 to 17.6 at.%. X-ray diffraction (XRD) analyses evidenced tetragonal phase of zirconia when the Y content was below 8 at.%, and cubic phase for higher concentration. Sputtered neutral mass spectrometry (SNMS) profiles confirmed that the control and stability of Y precursor temperature were of major importance to guarantee the …