0000000000123666
AUTHOR
S. Mäder
Nanofilm metal layers as vacuum quality sensors
Abstract A monitoring device for vacuum quality is realized by lowest cost single use oxygen sensors for vacuum insulation panels. They use the pressure dependence of oxide layer growth thickness on electrically measured metal nanofilms. These films were manufactured by e-beam evaporation, characterized in terms of resistance change with subsequent modeling of underlying mechanisms.
Nanofilm Low Cost Oxygen Sensors
Abstract The resitivity change of ultra thin metals under air exposure is used for vacuum or inert gas packaging control. In order to reach low cost, single use applications, few nm thin Aluminum layers were deposited on PET substrates and combined with wireless electronic readout circuitry. The sensor respose is characterized by resistance changes and explained in terms of multiphase diffusion mechanisms which are very sensitive to technological parameters.