6533b81ffe1ef96bd1277242

RESEARCH PRODUCT

Nanofilm Low Cost Oxygen Sensors

S. MäderTheodor DollThomas Haas

subject

ultrathin metalsMaterials scienceSingle useChemistry(all)technology industry and agriculturechemistry.chemical_elementNanotechnologyGeneral Medicineoxygen sensornanofilmAir exposurechemistryAluminiumChemical Engineering(all)sense organsDiffusion (business)Inert gasOxygen sensor

description

Abstract The resitivity change of ultra thin metals under air exposure is used for vacuum or inert gas packaging control. In order to reach low cost, single use applications, few nm thin Aluminum layers were deposited on PET substrates and combined with wireless electronic readout circuitry. The sensor respose is characterized by resistance changes and explained in terms of multiphase diffusion mechanisms which are very sensitive to technological parameters.

yearjournalcountryeditionlanguage
2009-09-01Procedia Chemistry
https://doi.org/10.1016/j.proche.2009.07.060