6533b7d0fe1ef96bd125adc1
RESEARCH PRODUCT
Nanofilm metal layers as vacuum quality sensors
Ulrich KunzeTheodor DollThomas HaasS. Mädersubject
Vacuum insulated panelMaterials sciencebusiness.industryOxidechemistry.chemical_elementNanotechnologyGeneral MedicineNanofilmEvaporation (deposition)Metalchemistry.chemical_compoundOxygen sensorQuality (physics)chemistryAluminiumvisual_artOxidationvisual_art.visual_art_mediumOptoelectronicsbusinessOxygen sensorLayer (electronics)Vacuum quality sensorEngineering(all)Aluminumdescription
Abstract A monitoring device for vacuum quality is realized by lowest cost single use oxygen sensors for vacuum insulation panels. They use the pressure dependence of oxide layer growth thickness on electrically measured metal nanofilms. These films were manufactured by e-beam evaporation, characterized in terms of resistance change with subsequent modeling of underlying mechanisms.
| year | journal | country | edition | language |
|---|---|---|---|---|
| 2010-01-01 | Procedia Engineering |