0000000000269548

AUTHOR

Eric Le Bourhis

0000-0003-0902-5899

showing 2 related works from this author

Enhanced Mechanical Properties in Organofluorosilica Thin Films

2008

Fluorinated hybrid organic-inorganic silicates (ORMOSIL) thin films display exceptional mechanical properties in terms of both hardness and elastic modulus that can be finely tuned by varying the angular velocity of the spin coating process. Hence, as traditional alkyl-modified silica xerogels generally show poor mechanical behavior, these materials offer a solution to a major limitation to applicability of ORMOSIL-based films.

Spin coatingMaterials scienceArticle Subjectlcsh:Technology (General)lcsh:T1-995General Materials ScienceAngular velocityThin filmComposite materialOrmosilElastic modulusJournal of Nanomaterials
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ORMOSIL thin films: Tuning mechanical properties via a nanochemistry approach

2006

The mechanical properties (hardness and elastic modulus) of organically modified silicate thin films can be finely tuned by varying the degree of alkylation and thus the fraction of six- and four-membered siloxane rings in the organosilica matrix. This opens the way to large tunability of parameters that are of crucial practical importance for films that are finding increasing application in numerous fields ranging from microelectronics to chemical sensing.

PhotonsMaterials sciencebusiness.industryNanochemistryNanotechnologySurfaces and InterfacesCondensed Matter PhysicsOrmosilSilicatePolymerizationtwo-photon polymerizationchemistry.chemical_compoundchemistrySiloxaneElectrochemistryMicroelectronicsGeneral Materials ScienceThin filmbusinessElastic modulusSpectroscopy
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