6533b7d5fe1ef96bd126533a

RESEARCH PRODUCT

Enhanced Mechanical Properties in Organofluorosilica Thin Films

Alexandra FidalgoRosaria CiriminnaLaura M. IlharcoMario PagliaroGiovanni PalmisanoEric Le Bourhis

subject

Spin coatingMaterials scienceArticle Subjectlcsh:Technology (General)lcsh:T1-995General Materials ScienceAngular velocityThin filmComposite materialOrmosilElastic modulus

description

Fluorinated hybrid organic-inorganic silicates (ORMOSIL) thin films display exceptional mechanical properties in terms of both hardness and elastic modulus that can be finely tuned by varying the angular velocity of the spin coating process. Hence, as traditional alkyl-modified silica xerogels generally show poor mechanical behavior, these materials offer a solution to a major limitation to applicability of ORMOSIL-based films.

10.1155/2008/964046https://doaj.org/article/a02dc9f5985445f4baab03c4e77a95c9