0000000000451536
AUTHOR
A. Grigonis
showing 2 related works from this author
Changes in Amorphous Hydrogenated Carbon Films by Ultraviolet and Infrared Laser Irradiation
2013
Amorphous hydrogenated carbon lms were formed on the Si (100) wafers by a direct-ion beam deposition method from pure acetylene and acetylene hydrogen gas mixtures. The lms were irradiated with a nanosecond Nd:YAG laser working at the rst harmonics (λ1 = 1064 nm), the fourth harmonics (λ4 = 266 nm) or with a Nd:YVO4 laser working at the third harmonic (λ3 = 355 nm). The lms were studied by the Raman scattering, micro-Fourier transform infrared and Fourier transform infrared spectroscopies, null-ellipsometry, optical and scanning electron microscope, and Vickers hardness method. Irradiation by the wavelength λ1 = 1064 nm leads to graphitization and formation of the silicon carbide, because o…
Hydrogen influence on the structure and properties of amorphous hydrogenated carbon films deposited by direct ion beam
2008
Abstract The present work provides results for amorphous hydrogenated carbon (a-C:H) films grown by direct ion beam deposition method. Acetylene and its mixtures with hydrogen were used. The films were characterized by Rutherford backscattering spectrometry, elastic recoil detection, Raman spectroscopy, ellipsometry, infrared spectroscopy, and microhardness measurements. These techniques indicated that an admixture of hydrogen yields a lower deposition rate, a higher content of total and bounded hydrogen in the a-C:H films, and a lower film density. The optical and mechanical properties depend on both, hydrogen concentrations in the gas phase and in the films, and show a strong diamond-like…