A diamond (1 0 0) surface with perfect phase purity

Abstract Diamond surfaces with (1 0 0) orientation and perfect phase purity regarding the coexistence of sp3 and sp2 bonding as well as near surface nitrogen implanted layers are repeatedly produced from one sample by a cycle of nitrogen implantation, etching in oxygen and wet chemical etching. Comprehensive surface studies carried out by X-ray photoelectron spectroscopy (XPS) involving a deconvolution of the C 1s peak into contributions of C sp3, C sp2 and C sp3(N) reveal the surface and near-surface phase and stoichiometry. It is demonstrated that efficient etching of nitrogen implanted diamond occurs by high temperature annealing in oxygen and a wet chemical treatment.