6533b82cfe1ef96bd128f3fe
RESEARCH PRODUCT
A diamond (1 0 0) surface with perfect phase purity
Yevgeniy ShapiroWolfgang HarneitNadine DiekMichael ReichlingRajesh TamangAndriy BorodinOleksiy Dyachenkosubject
Materials scienceAnnealing (metallurgy)technology industry and agricultureAnalytical chemistryGeneral Physics and Astronomychemistry.chemical_elementDiamondengineering.materialOxygenIsotropic etchingNitrogenchemistryX-ray photoelectron spectroscopyengineeringPhysical and Theoretical ChemistryPhase purityStoichiometrydescription
Abstract Diamond surfaces with (1 0 0) orientation and perfect phase purity regarding the coexistence of sp3 and sp2 bonding as well as near surface nitrogen implanted layers are repeatedly produced from one sample by a cycle of nitrogen implantation, etching in oxygen and wet chemical etching. Comprehensive surface studies carried out by X-ray photoelectron spectroscopy (XPS) involving a deconvolution of the C 1s peak into contributions of C sp3, C sp2 and C sp3(N) reveal the surface and near-surface phase and stoichiometry. It is demonstrated that efficient etching of nitrogen implanted diamond occurs by high temperature annealing in oxygen and a wet chemical treatment.
| year | journal | country | edition | language |
|---|---|---|---|---|
| 2015-11-01 | Chemical Physics Letters |