Niobium Nitride Thin Films for Very Low Temperature Resistive Thermometry

We investigate thin film resistive thermometry based on metal-to-insulator-transition (niobium nitride) materials down to very low temperature. The variation of the NbN thermometer resistance have been calibrated versus temperature and magnetic field. High sensitivity in tempertaure variation detection is demonstrated through efficient temperature coefficient of resistance. The nitrogen content of the niobium nitride thin films can be tuned to adjust the optimal working temperature range. In the present experiment, we show the versatility of the NbN thin film technology through applications in very different low temperature use-cases. We demonstrate that thin film resistive thermometry can …

Normal Metal-Insulator-Superconductor Tunnel Junctions With Pulsed Laser Deposited Titanium Nitride as Superconductor

Here we report the fabrication of normal metal – insulator – superconductor (NIS) tunnel junctions using superconducting titanium nitride grown by pulsed laser deposition (PLD). The films for NIS junction fabrication were deposited on two different substrates: silicon nitride film and magnesium oxide. TiN films were characterized by means of electrical transport measurements, and films with superconducting transition temperatures above the liquid helium boiling point were chosen for fabrication of NIS junctions. Tunnel junction devices were successfully fabricated using electron beam lithography and shadow evaporation techniques. The insulator layer formation was performed using two differe…

High quality superconducting titanium nitride thin film growth using infrared pulsed laser deposition

High-quality superconducting titanium nitride thin film growth using infra-red pulsed laser deposition

Superconducting titanium nitride (TiN) thin films were deposited on magnesium oxide, sapphire and silicon nitride substrates at 700 °C, using a pulsed laser deposition (PLD) technique, where infrared (1064 nm) pulses from a solid-state laser were used for the ablation from a titanium target in a nitrogen atmosphere. Structural studies performed with x-ray diffraction showed the best epitaxial crystallinity for films deposited on MgO. In the best films, superconducting transition temperatures, T C, as high as 4.8 K were observed, higher than in most previous superconducting TiN thin films deposited with reactive sputtering. A room temperature resistivity down to ~17 μΩ cm and residual resist…

Highly tunable NbTiN Josephson junctions fabricated with focused helium ion beam

We demonstrate a "direct writing" method for the fabrication of planar Josephson junctions from high quality superconducting niobium titanium nitride (NbTiN) thin films using focused He-ion beam irradiation. Compared to the materials previously used in such processing, YBCO and MgB$_2$, NbTiN has much better mechanical and electrical properties, as well as good corrosion resistance. We show that we can control the suppression of superconductivity in NbTiN as a function of the helium ion beam fluence, and that this controllable critical temperature suppression combined with the high spatial resolution and position control of the He-ion beam in a helium ion microscope enables us to successful…