0000000000993946

AUTHOR

A. Sagari A.r.

showing 2 related works from this author

Development of an MeV ion beam lithography system in Jyväskylä

2007

Abstract A lithographic facility for writing patterns with ion beams from cyclotron beams is under development for the Jyvaskyla cyclotron. Instead of focusing and deflecting the beam with electrostatic and magnetic fields a different approach is used. Here a small rectangular beam spot is defined by the shadow of a computer-controlled variable aperture in close proximity to the sample. This allows parallel exposure of rectangular pattern elements of 5–500 μm side with protons up to 6 MeV and heavy ions (20Ne, 85Kr) up to few 100 MeV. Here we present a short overview of the system under construction and development of the aperture design, which is a critical aspect for all ion beam lithogra…

Nuclear and High Energy PhysicsBeam diameterIon beamChemistrybusiness.industryIon beam lithographyFocused ion beamProton beam writingIon beam depositionOpticsPhysics::Plasma PhysicsPhysics::Accelerator PhysicsLaser beam qualityAtomic physicsNuclear ExperimentbusinessInstrumentationBeam (structure)Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
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Growth of osteoblasts on lithographically modified surfaces

2007

Here we report about preliminary investigations on developing substrates for culturing osteoblasts, the cells responsible for production of mineralised bone, by lithographically modifying the surfaces of several materials. The proton beam writing system at the National University of Singapore was used to fabricate high aspect ratio structures in PMMA, while two-dimensional low aspect ratio structures were fabricated using conventional electron beam lithography (EBL) and UV lithography (UVL) in SU-8. It was found that oxygen plasma treatment of structured SU-8 surfaces changed the surface layer and significantly improved cell attachment and proliferation. Cells grown on patterned thick PMMA …

Nuclear and High Energy PhysicsMaterials scienceAspect ratio (aeronautics)Scanning electron microscopetechnology industry and agricultureNanotechnologyOsteoblastProton beam writinglaw.inventionmedicine.anatomical_structurelawOxygen plasmamedicineSurface layerPhotolithographyInstrumentationElectron-beam lithographyNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
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