0000000001019348

AUTHOR

Aurel Crisan

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Study of TiO2 nanomembranes obtained by an induction heated MOCVD reactor

2015

Abstract Nanostructures of TiO2 were grown using the metal oxide chemical vapor deposition (MOCVD) technique. The procedure used induction heating on a graphite susceptor. This specific feature and the use of cobalt and ferrocene catalysts resulted in nanomembranes never obtained by common MOCVD reactors. The present study discusses the preparation of TiO2 nanomembranes and the dependence of nanomembrane structure and morphology on growth parameters.

Induction heatingMaterials scienceOxideGeneral Physics and Astronomychemistry.chemical_elementNanotechnologySurfaces and InterfacesGeneral ChemistryChemical vapor depositionCondensed Matter PhysicsEvaporation (deposition)Surfaces Coatings and Filmslaw.inventionSurface coatingchemistry.chemical_compoundchemistrylawMetalorganic vapour phase epitaxyCobaltSusceptorApplied Surface Science
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