6533b857fe1ef96bd12b4d2f

RESEARCH PRODUCT

Study of TiO2 nanomembranes obtained by an induction heated MOCVD reactor

Ioan CiobanuDenis ChaumontA. CrisbasanA.m. LazarM. SacilottiM. SacilottiAurel CrisanRémi ChassagnonYvon Lacroute

subject

Induction heatingMaterials scienceOxideGeneral Physics and Astronomychemistry.chemical_elementNanotechnologySurfaces and InterfacesGeneral ChemistryChemical vapor depositionCondensed Matter PhysicsEvaporation (deposition)Surfaces Coatings and Filmslaw.inventionSurface coatingchemistry.chemical_compoundchemistrylawMetalorganic vapour phase epitaxyCobaltSusceptor

description

Abstract Nanostructures of TiO2 were grown using the metal oxide chemical vapor deposition (MOCVD) technique. The procedure used induction heating on a graphite susceptor. This specific feature and the use of cobalt and ferrocene catalysts resulted in nanomembranes never obtained by common MOCVD reactors. The present study discusses the preparation of TiO2 nanomembranes and the dependence of nanomembrane structure and morphology on growth parameters.

yearjournalcountryeditionlanguage
2015-12-01Applied Surface Science
https://doi.org/10.1016/j.apsusc.2015.09.113