0000000001199322

AUTHOR

M. Nevala

showing 1 related works from this author

Utilisation of a sputtering device for targetry and diffusion studies

2004

A novel device for versatile sputtering applications is described. The apparatus design is realised for fulfilling the demands of both nuclear physics experiment target production and serial sectioning in solid-state diffusion studies with radiotracers. Results of several tests are reported, characterising the devise performance in these two differing applications.

Nuclear and High Energy PhysicsFabricationMaterials scienceSputtering0103 physical sciencesNanotechnology02 engineering and technologyDiffusion (business)021001 nanoscience & nanotechnology010306 general physics0210 nano-technology01 natural sciencesInstrumentationNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
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