6533b86efe1ef96bd12cb35c
RESEARCH PRODUCT
Utilisation of a sputtering device for targetry and diffusion studies
Ari VirtanenI. RiihimäkiJyrki RäisänenP. LaitinenP. LaitinenA. PirojenkoK. RanttilaM. NevalaR. Seppäläsubject
Nuclear and High Energy PhysicsFabricationMaterials scienceSputtering0103 physical sciencesNanotechnology02 engineering and technologyDiffusion (business)021001 nanoscience & nanotechnology010306 general physics0210 nano-technology01 natural sciencesInstrumentationdescription
A novel device for versatile sputtering applications is described. The apparatus design is realised for fulfilling the demands of both nuclear physics experiment target production and serial sectioning in solid-state diffusion studies with radiotracers. Results of several tests are reported, characterising the devise performance in these two differing applications.
| year | journal | country | edition | language |
|---|---|---|---|---|
| 2004-11-01 | Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms |