Multipole WIEN-filter for a high-resolution X-PEEM

Abstract The development and construction of an X-PEEM with integral multipole WIEN-filter for spectromicroscopy with high lateral resolution is presented. All relevant electron-optical properties of the filter have been examined by field and trajectory calculations. Electric and magnetic multipole components (dipole, quadrupole and hexapole) can be chosen independently from each other, thus allowing electron-optical corrections. Theoretical values for the lateral resolution are in the range of 10 nm, experimental values of ≤25 nm have been achieved using the column without filter. The instrument is designed in particular for the use of Sychrotron radiation as well as new, high-brilliance l…