6533b7cefe1ef96bd125787f
RESEARCH PRODUCT
Deconvolution of XPS spectra
O. AndersonD. Sprengersubject
Spectrum analyzerX-ray photoelectron spectroscopySpectrometerChemistryResolution (electron density)Phase (waves)Analytical chemistryDeconvolutionAtomic physicsBiochemistrySpectral lineAnalytical ChemistryLine (formation)description
The resolution of XPS spectra is limited mainly by instrumental parameters like the spectral line width of the exciting X-ray source and the finite energy resolution of the electron analyzer. If the line broadening functions resulting from the instrumental setup can be estimated and expressed by a spectrometer function, a mathematical recalculation of the intrinsic signal is possible by deconvolution. With the method presented in this paper, a resolution enhancement by a factor of 3 can be obtained. Measured spectra of physically correlated spin orbit doublets have been deconvoluted, and it is shown, that the intensity ratios and the positions are comparable with results obtained by highly resolved measurements using monochromatized X-rays and long acquisition times. Informations on phase compositions by an interpretation of chemical shifts of less then 0.6 eV are possible, too.
| year | journal | country | edition | language |
|---|---|---|---|---|
| 1991-01-01 | Fresenius' Journal of Analytical Chemistry |