0000000000046917
AUTHOR
O. Anderson
Deconvolution of XPS spectra
The resolution of XPS spectra is limited mainly by instrumental parameters like the spectral line width of the exciting X-ray source and the finite energy resolution of the electron analyzer. If the line broadening functions resulting from the instrumental setup can be estimated and expressed by a spectrometer function, a mathematical recalculation of the intrinsic signal is possible by deconvolution. With the method presented in this paper, a resolution enhancement by a factor of 3 can be obtained. Measured spectra of physically correlated spin orbit doublets have been deconvoluted, and it is shown, that the intensity ratios and the positions are comparable with results obtained by highly …
Investigations of TiO2 films deposited by different techniques
High refractive TiO2 films deposited by reactive electron beam evaporation, reactive ion plating and dip coating have been characterized by optical spectroscopy, electron spectroscopy for chemical analysis, Rutherford backscattering spectroscopy, nuclear reaction analysis and Raman spectroscopy. The spectral refractive index n exhibits a strong dependence on the deposition conditions. These findings will be connected to variations in density, stoichiometry, hydrogen content (H2O) and binding structure of the layers. A strong correlation is found between optical quantities and microscopic properties of TiO2 films.