6533b7cffe1ef96bd1257ca0

RESEARCH PRODUCT

Radiation hard monolithic CMOS sensors with small electrodes for High Luminosity LHC

I. BerdalovicI. BerdalovicT. WangL. Simon ArgemiDaniela BortolettoP. PangaudLaura GonellaS. BhatCraig ButtarA. F. HabibI. Asensi TortajadaI. Asensi TortajadaY. DegerliValerio DaoC. BespinMarlon BarberoT. HironoNorbert WermesP. BreugnonHaluk DenizliFlorian DachsFlorian DachsL. Flores Sanz De AcedoL. Flores Sanz De AcedoThanushan KugathasanHeinz PerneggerArchana SharmaArchana SharmaK. MoustakasPhilip Patrick AllportR. CardellaR. CardellaP. SchwemlingIgor MandićTomislav SuligojBojan HitiP. M. FreemanM. MunkerMateusz DyndalMarko MikužC. A. Solans SanchezEnrico Junior SchioppaPetra RiedlerW. SnoeysP. BarrillonTomasz HemperekHeidi SandakerK. Y. OyulmazF. Piro

subject

Nuclear and High Energy PhysicsParticle tracking detectors ; Radiation-hard detectors ; Electronic detector readout concepts ; CMOS sensors ; Monolithic active pixel sensorsPhysics::Instrumentation and DetectorscostsRadiationElectronic detector readout concepts01 natural sciences7. Clean energy030218 nuclear medicine & medical imaging03 medical and health sciences0302 clinical medicinesemiconductor detector: pixelElectronic detector readout conceptCMOS sensorselectrode: designParticle tracking detectors0103 physical sciences[PHYS.PHYS.PHYS-INS-DET]Physics [physics]/Physics [physics]/Instrumentation and Detectors [physics.ins-det]InstrumentationImage resolutionRadiation hardeningspatial resolutionradiation: damagePhysicsCMOS sensorsemiconductor detector: technologyMonolithic active pixel sensorPixelirradiation010308 nuclear & particles physicsbusiness.industrytracking detector: upgradeDetectorCMOS sensorParticle tracking detectorMonolithic active pixel sensorsUpgradeCERN LHC CollCMOSefficiencyOptoelectronicsbusinessperformanceRadiation-hard detectors

description

Abstract The upgrade of the tracking detectors for the High Luminosity-LHC (HL-LHC) requires the development of novel radiation hard silicon sensors. The development of Depleted Monolithic Active Pixel Sensors targets the replacement of hybrid pixel detectors with radiation hard monolithic CMOS sensors. We designed, manufactured and tested radiation hard monolithic CMOS sensors in the TowerJazz 180 nm CMOS imaging technology with small electrodes pixel designs. These designs can achieve pixel pitches well below current hybrid pixel sensors (typically 50 ×  50 μ m ) for improved spatial resolution. Monolithic sensors in our design allow to reduce multiple scattering by thinning to a total silicon thickness of only 50 μ m . Furthermore monolithic CMOS sensors can substantially reduce detector costs. These well-known advantages of CMOS sensor for performance and costs can only be exploited in pp-collisions at HL-LHC if the DMAPS sensors are designed to be radiation hard, capable of high hit rates and have a fast signal response to satisfy the 25 ns bunch crossing structure of LHC. Through the development of the MALTA and Mini-MALTA sensors we show the necessary steps to achieve radiation hardness at 1 0 15  n e q /cm2 for DMAPS with small electrode designs. The sensors combine high granularity (pitch 36.4x 36 . 4 μ m 2), low detector capacitance ( 5fF/pixel) of the charge collection electrode ( 3 μ m ), low noise (ENC ≈ 10 e − ) and low power operation (1 μ W/pixel) with a fast signal response (25 ns bunch crossing). The sensors feature arrays of 512 × 512 (MALTA) and 16 × 64 (Mini-MALTA) pixels. To cope with high hit rates expected at HL-LHC ( > 200 MHz/cm2) we have implemented a novel high-speed asynchronous readout architecture. The paper summarises the optimisation of the pixel design to achieve radiation hard pixel designs with full efficiency after irradiation at > 98% after 1 0 15  n e q /cm2).

10.1016/j.nima.2020.164381https://hal.archives-ouvertes.fr/hal-02999592