6533b7d1fe1ef96bd125d7bf

RESEARCH PRODUCT

Optical properties of ultrathin Al2O3/ZnO nanolaminates

V. VatamanDonats ErtsLina MikoliunaiteIeva BaleviciuteZanda GertnereArunas RamanaviciusPhilippe MieleMirna Chaker BechelanyValentyn SmyntynaA. Abou ChaayaA. ZalesskaZigmas BaleviciusRoman ViterRoman Viter

subject

PhotoluminescenceMaterials sciencebusiness.industryBilayerMetals and AlloysNanotechnologySurfaces and InterfacesSurfaces Coatings and FilmsElectronic Optical and Magnetic MaterialsBlueshiftAmorphous solidAtomic layer depositionMaterials ChemistryTransmittanceOptoelectronics[CHIM]Chemical SciencesbusinessSpectroscopyAbsorption (electromagnetic radiation)ComputingMilieux_MISCELLANEOUS

description

Abstract Because of their high resistance against ultraviolet and high energy particles, ultrathin amorphous nanolaminates can be very attractive for aerospace application. Here we report on the optical and structural properties of ultrathin Al2O3/ZnO nanolaminates deposited by Atomic Layer Deposition. Structural properties of nanolaminates were studied by GIXRD and AFM. Optical characterization was performed by transmittance, spectroscopic ellipsometry and photoluminescence (PL) spectroscopy. Regression analysis of ellipsometric spectra has shown that absorption peak decreases and blue shifted with the decrease of bilayer thickness in the stack. On the basis of the analysis of structural and optical properties of ultrathin nanolaminates, the amorphous nature of them is suggested.

yearjournalcountryeditionlanguage
2015-11-05
10.1016/j.tsf.2015.10.018https://hal.umontpellier.fr/hal-01688451