6533b7d2fe1ef96bd125ea67

RESEARCH PRODUCT

High efficiency frequency doubling in fully diced LiNbO3ridge waveguides on silicon

Mathieu ChauvetFabien HenrotVincent PecheurHervé MaillotteBrahim DahmaniLudovic Gauthier-manuelFlorent BassignotFabrice Devaux

subject

FabricationMaterials scienceSiliconbusiness.industrychemistry.chemical_elementSecond-harmonic generationPolishing02 engineering and technology021001 nanoscience & nanotechnology01 natural sciencesAtomic and Molecular Physics and OpticsElectronic Optical and Magnetic MaterialsGrinding010309 opticsWavelengthOpticschemistryRobustness (computer science)0103 physical sciencesWafer dicing0210 nano-technologybusiness

description

Nonlinear periodically poled ridge LiNbO3 waveguides have been fabricated on silicon substrates. Components are carved with only the use of a precision dicing machine without the need for grinding or polishing steps. They show efficient second harmonic generation at telecommunication wavelengths with normalized conversion reaching 204%/W in a 15 mm long device. The influence of the geometrical non uniformities of waveguides due to fabrication processes is asserted. Characteristics of the components are studied; notably their robustness and tunability versus temperature.

https://doi.org/10.1088/2040-8978/18/8/085503